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LumiGNtech co., Ltd.

R&D

 
R&D Patents

Patents

Current Domestic Patent Status

Application

Publication

Registration

Extinguishment

Rejection

2023.07.31

1

2

6

6

6

Application No.

Title of Invention

Status

Application

Filing Date

Registration

No.

Registration

Date

Publication

No.

Publication

Date

1020230096285

METHOD OF MANUFACTURING SELF-SEPARABLE SEMICONDUCTOR

SUBSTRATE AND SELF-SEPARABLE SEMICONDUCTOR SUBSTRATE

MANUFACTURED BY THE METHOD

Application

2023.07.24

 

 

 

 

1020230075289

Ga2O3 crystal film deposition method according to HVPE, deposition apparatus and Ga2O3 crystal film deposition substrate using the same

Publication

2023.06.13

 

 

1020230095885

2023.06.29

1020210160047

METHOD FOR GROWING NITRIDE FILM

Publication

2021.11.19

 

 

1020230073549

2023.05.26

1020120046448

Method of manufacturing a substrate

Registration

2012.05.02

1014202650000

2014.07.10

1020130044133

2013.05.02

1020210185166

Ga2O3 crystal film deposition method according to HVPE, deposition apparatus and Ga2O3 crystal film deposition substrate using the same

Registration

2021.12.22

1025460420000

2023.06.16

 

 

1020110002293

Method of manufacturing a substrate

Registration

2011.01.10

1011785040000

2012.08.24

1020120080846

2012.07.18

1020110048838

Method of manufacturing a substrate

Registration

2011.05.24

1011739850000

2012.08.08

 

 

1020140037524

Semiconductor substrate and method of manufacturing the same

Registration

2014.03.31

1014743730000

2014.12.12

 

 

1020080035114

SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Registration

2008.04.16

1009909710000

2010.10.25

1020090109730

2009.10.21

1020090105515

SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Extinguishment

2009.11.03

1011785050000

2012.08.24

1020110048795

2011.05.12

1020090074601

A BELLOWS ANGLE VALVE WITH A DAMPING CYLINDER

Extinguishment

2009.08.13

1011130620000

2012.01.31

1020110017094

2011.02.21

1020090092251

Reaction metal supply Units of Hydride Vapor Phase Epitaxy Reactor

Extinguishment

2009.09.29

1011442010000

2012.05.02

1020110034811

2011.04.06

1020120026686

APPARATUS FOR DEPOSITING THIN LAYER

Extinguishment

2012.03.15

1012484760000

2013.03.22

1020120034093

2012.04.09

1020080003160

SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME AND SEMICONDUCTOR DEVICE

Extinguishment

2008.01.10

1009454380000

2010.02.25

1020090077306

2009.07.15

1020080104550

SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Extinguishment

2008.10.24

1010187600000

2011.02.23

1020100045570

2010.05.04

1020200084854

PRODUCTION METHOD FOR MONOCRYSTALINE SUBSTRATE

Rejection

2020.07.09

 

 

1020220006880

 2022.01.18

1020140019545

Semiconductor substrate and method of manufacturing the same

Rejection

2014.02.20

 

 

1020150020498

2015.02.26

1020100116685

Reaction metal supply units of vertical hydride vapor phase epitaxy reactor

Rejection

2010.11.23

 

 

1020120055146

2012.05.31

1020090131785

APPARATUS FOR DEPOSITING THIN LAYER

Rejection

2009.12.28

 

 

1020110075352

2011.07.06

1020130111508

SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Rejection

2013.09.17

 

 

1020150032403

2015.03.26

1020120075882

Reaction metal supply units of vertical hydride vapor phase epitaxy reactor

Rejection

2012.07.12

 

 

1020140009638

2014.01.23





Current Foreign Patent Status

Application

Publication

Registration

Extinguishment

Rejection

2023.07.31

4

10

4

 

 1

Application No.

Title of Invention

Status

Application 

Filing Date

Registration

No.

Registration

Date

Publication

No.

Publication

Date

17818384

GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS 

AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME

Publication (US)

2022.08.09

 

 

20230193509

2023.06.22

202110778563.3

Method for manufacturing monocrystalline substrate

Publication (CN)

2021.07.09

 

 

113913929

2022.01.11

17560238

METHOD FOR GROWING NITRIDE FILM 

Publication (US)

2021.12.22

 

 

20230175121

2023.05.26

22188912.4

GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS 

AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME

Publication (EP)

(2022.08.05)

 

 

04202087

(2023.06.28)

22150441.8

METHOD FOR GROWING NITRIDE FILM 

Publication (EP)

(2022.01.06)

 

 

04184553

(2023.05.24)

110125078

Method for manufacturing monocrystalline substrate

Registration (TW)

(2021.07.08)

TW I763553. B

2022.05.01

202202674

(2022.01.16)

17364870

Method for manufacturing monocrystalline substrate

Publication (US)

(2021.06.30)

 

 

20220013357

(2022.01.13)

21183485.8

Method for manufacturing monocrystalline substrate

Publication (EP)

(2021.07.02)

 

 

03937208

(2022.01.12)

PCT/KR2009/001932

12935978

SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

Registration (US)

(2009.04.15)

15.04.2009

US 08729670. B2

2014.05.20

2009128646

20110024878

(2009.10.22)

03.02.2011

12917970

SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 

Rejection (US)

(2010.11.02)

 

 

20110101307

(2011.05.05)

13656734

Method of manufacturing substrate

Registration (US)

(2012.10.21)

US 8853064. B2

(2014.10.07)

20130178049

(2013.07.11)

2012-232668

Method of manufacturing substrate

Registration (JP)

2012.10.22

JP 5631952. B2

2014.10.22

2013-89975

2013.05.13

2021-113209

Method for manufacturing monocrystalline substrate

Publication (JP)

2021.07.08

 

 

JP.2022016374.A

2022.01.21

2021-210214

Method for growing nitride film

Publication (JP)

2021.12.24

 

 

JP.2023-75880.A

2023.05.31

202210011192.0

Method for growing nitride film

Publication (CN)

2022.01.06

 

 

CN.116154067.A

2023.05.23

110149185

Method for growing nitride film

Application (TW)

2021.12.28

 

 

 

 

2022-125784

GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS 

AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME

Application (JP)

2022.08.05

 

 

 

 

111130650

GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS 

AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME

Application (TW)

2022.08.15

 

 

 

 

202210912223.X

GA2O3 CRYSTAL FILM DEPOSITION METHOD ACCORDING TO HVPE, DEPOSITION APPARATUS 

AND GA2O3 CRYSTAL FILM-DEPOSITED SUBSTRATE USING THE SAME

Application (CN)

2022.07.29